MEMS process development

Focused process development brings constant quality and yield.

Your benefit

Your proven product concept needs to be further developed into a device that is ready for manufacturing with constant quality and yield in order to realize its true business potential.

We deliver

We develop a custom process flow ready for manufacturing and provide you with sufficient devices for verification of its functionality and quality. In this phase we identify Critical-to-Quality parameters by DoE and batch processing.

Our approach

Following a phase-gated approach, supported by regular and pro-active communication, we systematically develop the process and device according to your requirements.


  • Project management
  • Statistical process control (SPC)
  • Quality systems ISO9001, 13485
  • DfX, design for excellence
  • Design of experiments (DoE)
  • Risk management, FMEA
  • Cpk analysis, yield improvement

MEMS process development in the spotlight

Canon Production Printing – For the next generation in the printing process we are developing a fluidic MEMS device…

Elesta – Our main innovation challenges were the following: how to improve reliability, accuracy and sensitivity of the encoder…

When your current solution just doesn’t seem to do the trick, custom MEMS devices might be worthwhile investigating. How feasible would a custom MEMS device be for you?

When you need a custom MEMS device for your system, you can rely on our experts. Their expertise is to really understand your requirements, to show feasibility and proof of concept, develop the product and required process in a stage-gated manner and reproduce reliably & controlled.

We have over 30 years of experience in prototyping & assembly in our Micro Devices Facility called ‘Greenhouse’. Therefore, integral coupling with supply chain and manufacturing activities is assured.

News & events

Contact us about MEMS process development

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Robbert van der Waal, Sales director MEMS foundry, Philips Innovation Services

Robbert van der Waal
Business Development Director
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