MEMS manufacturing

Who we are

We are Innovation Engineering, operating the MEMS foundry at the High Tech Campus, Eindhoven, The Netherlands. For over 50 years, we have been the development and manufacturing foundry of Philips, a leader among MEMS manufacturers. We provide MEMS & Micro Devices expertise in MEMS proof-of-concept, MEMS processes and MEMS manufacturing that delivers MEMS technology and devices at high yields.

Today, with a highly skilled and diverse team of more than 10 nationalities, we are a successful pure-play foundry that serves technology leaders worldwide, ranging from start-ups to multinationals. In our 2650 m2 cleanroom, our teams work in shifts on state-of-the-art equipment, with a single-minded focus on quality and reliability. We are specialized in low to medium volume custom MEMS manufacturing.

We deliver

We bring together unique experience, expertise, methods and tools that few MEMS manufacturers can match. We run a customized process flow and manufacture your devices according to your required schedule and specifications. We get things done.

All our services are tailor-made in the first discussions with the customer. We value our customer’s input as our primary guidelines. Our MEMS manufacturing delivers your devices on time, meeting your requirements and quality standards.

Quality guaranteed

Our facility is ISO 9001:2015, 14001:2015 and 13485:2016 certified.

  • We provide outstanding capabilities for developing effective MEMS processes and proven MEMS manufacturing services that produce high yields and on-time delivery
  • We continuously improve the efficiency and effectiveness of our MEMS manufacturing processes, procedures, and systems through fast learning cycles
  • We pursue excellence in all aspects of our business by maintaining top industry standards and cultivating a culture of quality, innovation, and trust.

What is MEMS 

Micro-Electro-Mechanical Systems, or MEMS,  is a process technology used to create tiny integrated devices or systems that have both mechanical and electronic components. The functional elements of MEMS are for example: sensorsactuators, miniaturized structures and microelectronics.

Direct contact 

Robbert van der Waal, Sales director MEMS foundry, Philips Innovation Services

Robbert van der Waal
Business Development Director

Contact Robbert van der Waal

Our approach for MEMS manufacturing

Within the MEMS Foundry the Manufacturing Process Development (MPD) is used to guarantee that process development projects follow the same high quality standards. Projects are managed structurally to exceed customer expectations. This approach to standardizing MEMS processes comprises all essential phases and sub-processes from process definition to volume manufacturing.


Manufacturing Process Development (MPD) flow 

The goal of MPD is to provide a predictable and reliable path for MEMS processes from a concept towards manufacturing through a gated development process flow.

The development flow is comprised of a series of phases and gates. This allows a step-wise development strategy to minimize risks and costs, and enables close alignment between Philips Innovations Services and the customer.

Multiple production runs are used to iron out any significant quality or yield issues. Statistical process control and shop floor control are used as a standard. For very high volumes, we support process transfer to other foundries or MEMS manufacturers.

Manufacturing Process Development (MPD) flow step by step

Definition Phase


The project will be defined.

Customer requirements and a draft process flow are presented in a project plan.

Concept Phase


The process development is started with short loops.

This phase will yield the first feasibility batches.

Goal: feasibility proven

Design Phase


Process windows are defined, the process is tailored on basis of results of first prototypes.

Design is optimized for the process windows.

Goal: Design freeze

Engineering Phase


The process is repeated to prove stability and repeatability.

Goal: Process freeze

Qualification Phase


Production of qualified material. No NRE, wafer-based pricing.

Statistics to verify volume manufacturing.

Goal: Qualified process

Manufacturing Phase


Volume production at agreed schedules.

Process continued to be monitored.


Custom MEMS manufacturing with us

Innovation Engineering operates a state-of-the-art 2650 m2 pure-play MEMS Foundry on the High Tech Campus in Eindhoven, the Netherlands. This MEMS foundry is specialized in low to medium volume custom MEMS manufacturing. We typically work across a wide range of applications and markets, such as Medical.

In this video, our colleague Robbert van der Waal explains why we’ve teamed up with Philips Research to invest in a platform of ultrasound sensors and how MEMS (Micro Electro Mechanical System) are used for medical imaging applications.

Watch the video

What are your MEMS manufacturing needs?

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Robbert van der Waal, Sales director MEMS foundry, Philips Innovation Services

Robbert van der Waal
Business Development Director
Philips Innovation Services MEMS Foundry

MEMS Foundry 

Innovation Engineering operates a state-of-the-art 2650 m2 pure-play MEMS Foundry on the High Tech Campus in Eindhoven, the Netherlands (see background picture). This MEMS Foundry is specialized in low to medium volume custom MEMS manufacturing.

More about MEMS Foundry

MEMS & Micro Devices expertise 

Our 140 experts design, develop and manufacture custom microelectromechanical systems (MEMS) and assemble micro devices. We follow a phase-gated approach; from demonstrating feasibility and giving proof of concept, up to manufacturing your devices with the right quality.

More about MEMS & Micro Devices expertise

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