MEMS actuators

Our thin film capabilities allow us to act as a pure-play foundry for a wide range of MEMS devices & actuators.

Tools for making MEMS actuators:

  • Lithography down to 0.5 μm feature size
  • Deposition of various materials by:
    – Sputtering
    – Evaporation
    – LP
    – PECVD
  • Etching:
    – (D)RIE
    – Wet etching

Download the specification sheet on all MEMS foundry process capabilities ›

Our large variety of tools allow us to manufacture MEMS actuators in silicon and glass. We have a proprietary thin-film piezo technology to integrate actuators into the wafer processing flow.

Check out our other MEMS applications

MEMS applications are many. Organ-on-a-chip for example, where a human organ is reproduced in its most elementary form: microelectromechanical systems device. Several applications stand out, because of their promise and our capabilities.

Relevant for you: MEMS & Micro Devices MEMS is our expertise

Sustainable competitive advantage through custom MEMS devices. Check out our services in the MEMS & Micro Devices key area of expertise.

Contact us about MEMS actuators

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